Module metrology log info

Condition ID Condition ID	Measurement date Measurement date	Method Method	Operator Operator	ΔX [μm] ΔX [μm]	ΔY [μm] ΔY [μm]	Δα [μrad] Δα [μrad]	Options Options
3756221 3756221	2024-09-20 14:00:00 2024-09-20 14:00:00	Tilted Camera Tilted Camera		4.25 ± 3.55 4.25 ± 3.55	0 ± 2.11 0 ± 2.11	0 ± 45 0 ± 45

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Test log info

Log ID Log ID	Log date Log date	Part name Part name	Test type Test type	Station Station	In Spec In Spec
348 348	2024-09-24 09:46:57 2024-09-24 09:46:57	2S_18_6_BEL-10001 2S_18_6_BEL-10001	Module metrology Module metrology	MET MET

Stored files

File ID File ID	Path Path	Options Options
303 303	app/metrology/2024_09_24_09_46_57_BEL10001.txt app/metrology/2024_09_24_09_46_57_BEL10001.txt

DCA uploads

Upload ID Upload ID	Uploaded file path Uploaded file path	Succeeded Succeeded	Options Options
134 134	app/xml/tests/met_00010_2024_10_14_14_30_38.xml app/xml/tests/met_00010_2024_10_14_14_30_38.xml	yes yes

Comments

Uncertainties are obtained by assigning to each measurement point n uncertainty of 5 um in x and 3 um in y which reflects the current precision of the setup.