GABRIEL

Global Assembly Bookkeeping
with
Relational Image and Event Logging

Module metrology Logs

Log ID Log ID	Measurement date Measurement date	Method Method	Module Module	ΔX [μm] ΔX [μm]	ΔY [μm] ΔY [μm]	Δα [μrad] Δα [μrad]
75 75	2025-07-03 10:53 2025-07-03 10:53	Brown Brown	2S_18_6_BEL-10050 2S_18_6_BEL-10050	-3.8 ± 4 -3.8 ± 4	-9.4 ± 4 -9.4 ± 4	21.8 ± 40 21.8 ± 40
74 74	2025-07-01 11:44 2025-07-01 11:44	Brown Brown	2S_18_6_BEL-10049 2S_18_6_BEL-10049	-3.9 ± 4 -3.9 ± 4	-3 ± 4 -3 ± 4	52.9 ± 40 52.9 ± 40
73 73	2025-07-01 11:08 2025-07-01 11:08	Brown Brown	2S_18_6_BEL-10048 2S_18_6_BEL-10048	-1 ± 4 -1 ± 4	-8.8 ± 4 -8.8 ± 4	90.1 ± 40 90.1 ± 40
72 72	2025-06-30 14:43 2025-06-30 14:43	Brown Brown	2S_18_6_BEL-10047 2S_18_6_BEL-10047	-1.9 ± 4 -1.9 ± 4	-11.3 ± 4 -11.3 ± 4	-96.3 ± 40 -96.3 ± 40
71 71	2025-06-30 14:05 2025-06-30 14:05	Brown Brown	2S_18_6_BEL-10046 2S_18_6_BEL-10046	-3.7 ± 4 -3.7 ± 4	-10.3 ± 4 -10.3 ± 4	62.6 ± 40 62.6 ± 40
70 70	2025-06-30 12:45 2025-06-30 12:45	Brown Brown	2S_18_6_BEL-10045 2S_18_6_BEL-10045	-1.1 ± 4 -1.1 ± 4	-14 ± 4 -14 ± 4	35.2 ± 40 35.2 ± 40
69 69	2025-06-27 13:46 2025-06-27 13:46	Brown Brown	2S_18_6_BEL-10043 2S_18_6_BEL-10043	-5.7 ± 4 -5.7 ± 4	-10.7 ± 4 -10.7 ± 4	-73.8 ± 40 -73.8 ± 40
68 68	2025-06-30 11:49 2025-06-30 11:49	Brown Brown	2S_18_6_BEL-10044 2S_18_6_BEL-10044	-1.6 ± 4 -1.6 ± 4	10.9 ± 4 10.9 ± 4	115.1 ± 40 115.1 ± 40
67 67	2025-06-27 13:09 2025-06-27 13:09	Brown Brown	2S_18_6_BEL-10042 2S_18_6_BEL-10042	-1.3 ± 4 -1.3 ± 4	-5.1 ± 4 -5.1 ± 4	-26 ± 40 -26 ± 40
66 66	2025-06-27 12:03 2025-06-27 12:03	Brown Brown	2S_18_6_BEL-10041 2S_18_6_BEL-10041	-4.3 ± 4 -4.3 ± 4	-10.9 ± 4 -10.9 ± 4	43.9 ± 40 43.9 ± 40
65 65	2025-06-27 11:05 2025-06-27 11:05	Brown Brown	2S_18_6_BEL-10040 2S_18_6_BEL-10040	2.7 ± 4 2.7 ± 4	-9.4 ± 4 -9.4 ± 4	148.4 ± 40 148.4 ± 40
64 64	2025-06-24 14:31 2025-06-24 14:31	Brown Brown	2S_18_6_BEL-10039 2S_18_6_BEL-10039	8.9 ± 4 8.9 ± 4	9.2 ± 4 9.2 ± 4	-99.8 ± 40 -99.8 ± 40
63 63	2025-06-24 14:30 2025-06-24 14:30	Brown Brown	2S_18_6_BEL-10037 2S_18_6_BEL-10037	1.2 ± 4 1.2 ± 4	12.4 ± 4 12.4 ± 4	18.3 ± 40 18.3 ± 40
62 62	2025-06-24 14:27 2025-06-24 14:27	Brown Brown	2S_18_6_BEL-10036 2S_18_6_BEL-10036	-0.8 ± 4 -0.8 ± 4	8.2 ± 4 8.2 ± 4	152.3 ± 40 152.3 ± 40
61 61	2025-06-24 11:55 2025-06-24 11:55	Brown Brown	2S_18_6_BEL-10038 2S_18_6_BEL-10038	-2.3 ± 4 -2.3 ± 4	-5.7 ± 4 -5.7 ± 4	-32.5 ± 40 -32.5 ± 40
60 60	2025-06-23 14:44 2025-06-23 14:44	Brown Brown	2S_18_6_BEL-10035 2S_18_6_BEL-10035	-16.4 ± 4 -16.4 ± 4	-9.9 ± 4 -9.9 ± 4	-43.2 ± 40 -43.2 ± 40
59 59	2025-06-23 12:51 2025-06-23 12:51	Brown Brown	2S_18_6_BEL-10034 2S_18_6_BEL-10034	0.5 ± 4 0.5 ± 4	0.2 ± 4 0.2 ± 4	-122.9 ± 40 -122.9 ± 40
58 58	2025-06-23 12:11 2025-06-23 12:11	Brown Brown	2S_18_6_BEL-10032 2S_18_6_BEL-10032	3.7 ± 4 3.7 ± 4	-10.8 ± 4 -10.8 ± 4	124.3 ± 40 124.3 ± 40
57 57	2025-06-23 11:21 2025-06-23 11:21	Brown Brown	2S_18_6_BEL-10033 2S_18_6_BEL-10033	-5.3 ± 4 -5.3 ± 4	-14 ± 4 -14 ± 4	4.5 ± 40 4.5 ± 40
56 56	2025-06-20 15:07 2025-06-20 15:07	Brown Brown	2S_18_6_BEL-10030 2S_18_6_BEL-10030	4 ± 4 4 ± 4	9.8 ± 4 9.8 ± 4	-41.6 ± 40 -41.6 ± 40