GABRIEL

Global Assembly Bookkeeping
with
Relational Image and Event Logging

Module metrology Logs

Log ID Log ID	Measurement date Measurement date	Method Method	Module Module	ΔX [μm] ΔX [μm]	ΔY [μm] ΔY [μm]	Δα [μrad] Δα [μrad]
144 144	2025-09-01 14:15 2025-09-01 14:15	Brown Brown	2S_40_6_BEL-10065 2S_40_6_BEL-10065	-15.6 ± 4 -15.6 ± 4	-8.6 ± 4 -8.6 ± 4	15.7 ± 40 15.7 ± 40
143 143	2025-09-01 13:41 2025-09-01 13:41	Brown Brown	2S_40_6_BEL-10064 2S_40_6_BEL-10064	-8.1 ± 4 -8.1 ± 4	-7.9 ± 4 -7.9 ± 4	-28.3 ± 40 -28.3 ± 40
142 142	2025-09-01 12:03 2025-09-01 12:03	Brown Brown	2S_40_6_BEL-10063 2S_40_6_BEL-10063	-0.1 ± 4 -0.1 ± 4	-27.7 ± 4 -27.7 ± 4	-204.5 ± 40 -204.5 ± 40
141 141	2025-09-01 11:27 2025-09-01 11:27	Brown Brown	2S_40_6_BEL-10062 2S_40_6_BEL-10062	-5.2 ± 4 -5.2 ± 4	-23.5 ± 4 -23.5 ± 4	-51.7 ± 40 -51.7 ± 40
140 140	2025-09-01 10:51 2025-09-01 10:51	Brown Brown	2S_40_6_BEL-10061 2S_40_6_BEL-10061	2.6 ± 4 2.6 ± 4	-16.7 ± 4 -16.7 ± 4	181.5 ± 40 181.5 ± 40
139 139	2025-08-29 15:20 2025-08-29 15:20	Brown Brown	2S_40_6_BEL-10059 2S_40_6_BEL-10059	-10.4 ± 4 -10.4 ± 4	2.1 ± 4 2.1 ± 4	253.5 ± 40 253.5 ± 40
138 138	2025-08-29 14:31 2025-08-29 14:31	Brown Brown	2S_40_6_BEL-10058 2S_40_6_BEL-10058	-18.8 ± 4 -18.8 ± 4	31.6 ± 4 31.6 ± 4	262.7 ± 40 262.7 ± 40
137 137	2025-08-29 13:52 2025-08-29 13:52	Brown Brown	2S_40_6_BEL-10057 2S_40_6_BEL-10057	-9.8 ± 4 -9.8 ± 4	20.7 ± 4 20.7 ± 4	-45.8 ± 40 -45.8 ± 40
136 136	2025-08-29 12:05 2025-08-29 12:05	Brown Brown	2S_40_6_BEL-10056 2S_40_6_BEL-10056	-24.2 ± 4 -24.2 ± 4	4.6 ± 4 4.6 ± 4	246.6 ± 40 246.6 ± 40
135 135	2025-08-29 12:04 2025-08-29 12:04	Brown Brown	2S_40_6_BEL-10060 2S_40_6_BEL-10060	-4.8 ± 4 -4.8 ± 4	-10.2 ± 4 -10.2 ± 4	13.4 ± 40 13.4 ± 40
134 134	2025-08-28 14:32 2025-08-28 14:32	Brown Brown	2S_40_6_BEL-10055 2S_40_6_BEL-10055	-15.2 ± 4 -15.2 ± 4	8.2 ± 4 8.2 ± 4	-36.3 ± 40 -36.3 ± 40
133 133	2025-08-28 13:57 2025-08-28 13:57	Brown Brown	2S_40_6_BEL-10054 2S_40_6_BEL-10054	-6.4 ± 4 -6.4 ± 4	-9.1 ± 4 -9.1 ± 4	129.2 ± 40 129.2 ± 40
132 132	2025-08-28 12:22 2025-08-28 12:22	Brown Brown	2S_40_6_BEL-10053 2S_40_6_BEL-10053	-1.4 ± 4 -1.4 ± 4	-6.8 ± 4 -6.8 ± 4	-190.3 ± 40 -190.3 ± 40
131 131	2025-08-28 11:45 2025-08-28 11:45	Brown Brown	2S_40_6_BEL-10052 2S_40_6_BEL-10052	-3.5 ± 4 -3.5 ± 4	-21.9 ± 4 -21.9 ± 4	-33 ± 40 -33 ± 40
130 130	2025-08-28 11:07 2025-08-28 11:07	Brown Brown	2S_40_6_BEL-10051 2S_40_6_BEL-10051	5.4 ± 4 5.4 ± 4	-16.8 ± 4 -16.8 ± 4	189.2 ± 40 189.2 ± 40
129 129	2025-08-26 13:41 2025-08-26 13:41	Brown Brown	2S_40_6_BEL-10050 2S_40_6_BEL-10050	-12.1 ± 4 -12.1 ± 4	-18.8 ± 4 -18.8 ± 4	73.2 ± 40 73.2 ± 40
128 128	2025-08-26 13:08 2025-08-26 13:08	Brown Brown	2S_40_6_BEL-10049 2S_40_6_BEL-10049	-4.7 ± 4 -4.7 ± 4	-5.9 ± 4 -5.9 ± 4	180.2 ± 40 180.2 ± 40
127 127	2025-08-26 12:33 2025-08-26 12:33	Brown Brown	2S_40_6_BEL-10048 2S_40_6_BEL-10048	-2.5 ± 4 -2.5 ± 4	-11.6 ± 4 -11.6 ± 4	-123.7 ± 40 -123.7 ± 40
126 126	2025-08-26 11:57 2025-08-26 11:57	Brown Brown	2S_40_6_BEL-10047 2S_40_6_BEL-10047	-5.1 ± 4 -5.1 ± 4	-25.3 ± 4 -25.3 ± 4	-48.4 ± 40 -48.4 ± 40
125 125	2025-08-26 11:07 2025-08-26 11:07	Brown Brown	2S_40_6_BEL-10046 2S_40_6_BEL-10046	7.1 ± 4 7.1 ± 4	-19.5 ± 4 -19.5 ± 4	261.7 ± 40 261.7 ± 40