Module metrology log info

Condition ID
 
Measurement date
 
Method
 
Operator
 
ΔX [μm]
 
ΔY [μm]
 
Δα [μrad]
 
Options
 
5195561
 
2025-08-22 11:59:33
 
Brown
 
Eliott
 
-3.1 ± 4
 
-10.9 ± 4
 
124.8 ± 40
 
 
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Test log info

Log ID
 
Log date
 
Part name
 
Test type
 
Station
 
In Spec
 
3184
 
2025-08-22 11:59:35
 
MET
 
 

Stored files

File ID
 
Path
 
Options
 

DCA uploads

Upload ID
 
Uploaded file path
 
Succeeded
 
Options
 
2564
 
yes
 
 

Comments

In specs, NETR