Module metrology log info

Condition ID
 
Measurement date
 
Method
 
Operator
 
ΔX [μm]
 
ΔY [μm]
 
Δα [μrad]
 
Options
 
5299061
 
2025-09-01 14:15:00
 
Brown
 
Aamir
 
-15.6 ± 4
 
-8.6 ± 4
 
15.7 ± 40
 
 
Loading ...

Test log info

Log ID
 
Log date
 
Part name
 
Test type
 
Station
 
In Spec
 
3792
 
2025-09-01 14:15:01
 
MET
 
 

Stored files

File ID
 
Path
 
Options
 

DCA uploads

Upload ID
 
Uploaded file path
 
Succeeded
 
Options
 
3189
 
yes
 
 

Comments

All in spec: some glue spots on top NW, NETR