Module metrology log info

Condition ID
 
Measurement date
 
Method
 
Operator
 
ΔX [μm]
 
ΔY [μm]
 
Δα [μrad]
 
Options
 
4664801
 
2025-06-19 15:53:04
 
Brown
 
Franco
 
-3.9 ± 4
 
-9.2 ± 4
 
9.2 ± 40
 
 
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Test log info

Log ID
 
Log date
 
Part name
 
Test type
 
Station
 
In Spec
 
1289
 
2025-06-19 15:53:07
 
MET
 
 

Stored files

File ID
 
Path
 
Options
 

DCA uploads

Upload ID
 
Uploaded file path
 
Succeeded
 
Options
 
680
 
no
 
 
791
 
yes
 
 

Comments

In spec. some contamination in one corner (NW top). I had to clean it and re-do the mearsurement.