Module metrology log info

Condition ID
 
Measurement date
 
Method
 
Operator
 
ΔX [μm]
 
ΔY [μm]
 
Δα [μrad]
 
Options
 
4697041
 
2025-06-27 13:09:54
 
Brown
 
Hugues
 
-1.3 ± 4
 
-5.1 ± 4
 
-26 ± 40
 
 
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Test log info

Log ID
 
Log date
 
Part name
 
Test type
 
Station
 
In Spec
 
1466
 
2025-06-27 13:09:57
 
MET
 
 

Stored files

File ID
 
Path
 
Options
 

DCA uploads

Upload ID
 
Uploaded file path
 
Succeeded
 
Options
 
934
 
yes
 
 

Comments

Measurements look good. Presence of small chips (top side only) during inspection.