Module metrology log info

Condition ID
 
Measurement date
 
Method
 
Operator
 
ΔX [μm]
 
ΔY [μm]
 
Δα [μrad]
 
Options
 
 
2025-07-24 13:21:20
 
Brown
 
Hugues
 
-5.8 ± 4
 
-24 ± 4
 
-101.2 ± 40
 
 
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Test log info

Log ID
 
Log date
 
Part name
 
Test type
 
Station
 
In Spec
 
2171
 
2025-07-24 13:21:21
 
MET
 
 

Stored files

File ID
 
Path
 
Options
 

DCA uploads

Upload ID
 
Uploaded file path
 
Succeeded
 
Options
 

Comments

In spec. Pattern recognition successful