GABRIEL

Global Assembly Bookkeeping
with
Relational Image and Event Logging

Module metrology Logs

Log ID
 
Measurement date
 
Method
 
Module
 
ΔX [μm]
 
ΔY [μm]
 
Δα [μrad]
 
In Spec
 
Options
 
Brown
 
 
 
Brown
 
 
 
Brown
 
 
 
Brown
 
 
 
Brown
 
 
 
Brown
 
 
 
Brown
 
 
 
Brown
 
 
 
Tilted Camera
 
 
 
Tilted Camera
 
 
 
Brown
 
 
 
Brown
 
 
 
Tilted Camera
 
 
 
Tilted Camera
 
 
 
Tilted Camera
 
 
 
Tilted Camera
 
 
 
Tilted Camera
 
 
 
Tilted Camera
 
 
 
Tilted Camera
 
 
 
Tilted Camera