GABRIEL

Global Assembly Bookkeeping
with
Relational Image and Event Logging

Module metrology Logs

Log ID Log ID	Measurement date Measurement date	Method Method	Module Module	ΔX [μm] ΔX [μm]	ΔY [μm] ΔY [μm]	Δα [μrad] Δα [μrad]
124 124	2025-08-25 14:06 2025-08-25 14:06	Brown Brown	2S_40_6_BEL-10045 2S_40_6_BEL-10045	-2.7 ± 4 -2.7 ± 4	-2.4 ± 4 -2.4 ± 4	-47.7 ± 40 -47.7 ± 40
123 123	2025-08-25 13:22 2025-08-25 13:22	Brown Brown	2S_40_6_BEL-10044 2S_40_6_BEL-10044	-0.2 ± 4 -0.2 ± 4	-15.9 ± 4 -15.9 ± 4	76.1 ± 40 76.1 ± 40
122 122	2025-08-25 12:35 2025-08-25 12:35	Brown Brown	2S_40_6_BEL-10043 2S_40_6_BEL-10043	-2.1 ± 4 -2.1 ± 4	-13.1 ± 4 -13.1 ± 4	-200.7 ± 40 -200.7 ± 40
121 121	2025-08-25 11:56 2025-08-25 11:56	Brown Brown	2S_40_6_BEL-10042 2S_40_6_BEL-10042	-6.4 ± 4 -6.4 ± 4	-20 ± 4 -20 ± 4	-8.2 ± 40 -8.2 ± 40
120 120	2025-08-25 11:14 2025-08-25 11:14	Brown Brown	2S_40_6_BEL-10041 2S_40_6_BEL-10041	5.8 ± 4 5.8 ± 4	-14.3 ± 4 -14.3 ± 4	191.8 ± 40 191.8 ± 40
119 119	2025-08-22 14:54 2025-08-22 14:54	Brown Brown	2S_40_6_BEL-10036 2S_40_6_BEL-10036	-2.7 ± 4 -2.7 ± 4	-26.7 ± 4 -26.7 ± 4	54 ± 40 54 ± 40
118 118	2025-08-22 14:16 2025-08-22 14:16	Brown Brown	2S_40_6_BEL-10037 2S_40_6_BEL-10037	-9.2 ± 4 -9.2 ± 4	-23.8 ± 4 -23.8 ± 4	-99.2 ± 40 -99.2 ± 40
117 117	2025-08-22 12:46 2025-08-22 12:46	Brown Brown	2S_40_6_BEL-10038 2S_40_6_BEL-10038	-3.3 ± 4 -3.3 ± 4	-14.6 ± 4 -14.6 ± 4	-170.1 ± 40 -170.1 ± 40
116 116	2025-08-22 11:59 2025-08-22 11:59	Brown Brown	2S_40_6_BEL-10039 2S_40_6_BEL-10039	-3.1 ± 4 -3.1 ± 4	-10.9 ± 4 -10.9 ± 4	124.8 ± 40 124.8 ± 40
115 115	2025-08-22 11:19 2025-08-22 11:19	Brown Brown	2S_40_6_BEL-10040 2S_40_6_BEL-10040	-10 ± 4 -10 ± 4	0.3 ± 4 0.3 ± 4	-41.5 ± 40 -41.5 ± 40
114 114	2025-08-21 13:50 2025-08-21 13:50	Brown Brown	2S_40_6_BEL-10033 2S_40_6_BEL-10033	4 ± 4 4 ± 4	-12 ± 4 -12 ± 4	168.7 ± 40 168.7 ± 40
113 113	2025-08-21 13:08 2025-08-21 13:08	Brown Brown	2S_40_6_BEL-10034 2S_40_6_BEL-10034	-2.8 ± 4 -2.8 ± 4	-25 ± 4 -25 ± 4	-46.4 ± 40 -46.4 ± 40
112 112	2025-08-21 12:41 2025-08-21 12:41	Brown Brown	2S_40_6_BEL-10035 2S_40_6_BEL-10035	-20.9 ± 4 -20.9 ± 4	3.6 ± 4 3.6 ± 4	-192.7 ± 40 -192.7 ± 40
111 111	2025-08-05 14:40 2025-08-05 14:40	Brown Brown	2S_18_6_BEL-10044 2S_18_6_BEL-10044	1.6 ± 4 1.6 ± 4	-10.9 ± 4 -10.9 ± 4	115.1 ± 40 115.1 ± 40
110 110	2025-08-05 14:36 2025-08-05 14:36	Brown Brown	2S_40_6_BEL-10005 2S_40_6_BEL-10005	-0.4 ± 4 -0.4 ± 4	-12 ± 4 -12 ± 4	-190.8 ± 40 -190.8 ± 40
109 109	2025-08-05 14:35 2025-08-05 14:35	Brown Brown	2S_40_6_BEL-10006 2S_40_6_BEL-10006	-33.6 ± 4 -33.6 ± 4	-12.2 ± 4 -12.2 ± 4	-728.9 ± 40 -728.9 ± 40
108 108	2025-08-05 14:33 2025-08-05 14:33	Brown Brown	2S_40_6_BEL-10009 2S_40_6_BEL-10009	-0.2 ± 4 -0.2 ± 4	-8.6 ± 4 -8.6 ± 4	-180.5 ± 40 -180.5 ± 40
107 107	2025-08-05 14:28 2025-08-05 14:28	Brown Brown	2S_40_6_BEL-10011 2S_40_6_BEL-10011	3 ± 4 3 ± 4	-16.6 ± 4 -16.6 ± 4	164.2 ± 40 164.2 ± 40
106 106	2025-08-04 11:43 2025-08-04 11:43	Brown Brown	2S_40_6_BEL-10032 2S_40_6_BEL-10032	0.3 ± 4 0.3 ± 4	-18.9 ± 4 -18.9 ± 4	130.3 ± 40 130.3 ± 40
105 105	2025-08-04 11:07 2025-08-04 11:07	Brown Brown	2S_40_6_BEL-10031 2S_40_6_BEL-10031	5.4 ± 4 5.4 ± 4	-29.1 ± 4 -29.1 ± 4	154.1 ± 40 154.1 ± 40