GABRIEL

Global Assembly Bookkeeping
with
Relational Image and Event Logging

Module metrology Logs

Log ID Log ID	Measurement date Measurement date	Method Method	Module Module	ΔX [μm] ΔX [μm]	ΔY [μm] ΔY [μm]	Δα [μrad] Δα [μrad]	In Spec In Spec	Options Options
2 2	2023-08-22 14:24 2023-08-22 14:24	Tilted Camera Tilted Camera	2S_18_6_BEL-01001 2S_18_6_BEL-01001	3 ± 10 3 ± 10	2 ± 10 2 ± 10	-52.9 ± 70 -52.9 ± 70